How to use this guide

Download the Program

Install the Program

File Directory

Start the Program

Quick Start from System Flow Chart

Define Key Product and Key Process

Measure Process Performances

Analyze Process Performance

	Lot performance
	Process Performance
	Product Family Performance
	Overall Performance

 Improve Performance

	Lot Level ICAR
	Process Level ICAR
	Product Level ICAR
	System Level ICAR

Control Phase

	Manage ICAR
	Report Performance

 Knowledge Base – Long-term System Behavior Study

Single-Step Process

Multi-step Process

General

Unlock the Program